E SC 581
Microelectromechanical Systems/Smart Structures (3) Methods of micromachining, smart structure fabrication. Design, modeling for physical, chemical, biomedical microsensors/actuators. Smart structures and microsystems packaging/integration.
Microelectromechanical Systems/Smart Structures (3)
General Education: None
Diversity: None
Bachelor of Arts: None
Effective: Spring 1998
Prerequisite:
E SC 414
Note : Class size, frequency of offering, and evaluation methods will vary by location and instructor. For these details check the specific course syllabus.